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The OS Rotating Target Holder (OS-TH) allows the correct positioning of the target material during ablation.
The target rotation allows a better uniformity consumption of the target. The device can be adjusted (x, y) by external knobs to allow optimal target positioning. A DN16CF port allows to introduce processing gas in the vicinity of the target during ablation. The electrical layout of the OS-TH has been especially designed to operate in presence of plasma.
The OS-TH uses ceramic ball bearings and high voltage grounding element

Characteristics

Target Dimensions	30mm diameter (max)
Connecting Flange	UHV DN40CF
Power Transmission	by magnetical rotary feedthrough
Rotating Speed (adjustable)	up to 20rpm
Z Axis (adjustable)	50mm (optional)
Adjustable X, Y Tilting of the Target	up to +/- 6°
Flange for the Gas Inlet	UHV DN16CF