RF Plasma Cleaner

Accessories

The OS Radio Frequency Plasma Cleaner (OS-RFPC) is especially designed to operate in the Load-Lock (OS-LL) unit. Samples introduced in the fast entry lock of the OS-LL may be conveniently treated by a RF Plasma in order to give a final cleaning in situ.

Characteristics

RF Power 25W
Frequency 13.56 MHz quartz controlled
Harmonic Content +30dB
Output Connector BNC female
Power Requirements 220 V ac 50-60 Hz
Dimensions (mm) Generator 230x230x130 / converter 80x50x40

 

RF Plasma Cleaner