Load Lock System

 

The OS Load Lock (OS-LL) is especially designed for the use in connection with the standard OS PPD deposition system (Twin Spark PPD system) allowing to transfer samples up to 2? diameter to the deposition system and is connected to a CF100 flange by a gate valve. It is equipped with a 1000 mm magnetic translator, a port-aligner, a fast 100 mm diameter entry door for inserting samples, lamp, inspection window, roughening valve, gas inlet valve and pressure gauges. A CF40 flange provides the port for optional installation of the Radio Frequency Plasma Cleaning antenna (OS-RFPLCL) designed by OS for the OS-LL. The OS-RFPLCL unit (optional) is equipped with a specially designed power supply.

 

Characteristics

 

 

Dimensions

100 mm diameter, 270 mm length

Connecting flange

UHV DN100CF / DN63CF

Magnetic translator

1000/1200 mm length and port aligner

Turbo/Gate Valve (Optiona)

UHV DN63CF

Fast-entry door

UHV DN100 ISO K

Pressure gauge

Pirani (Penning optional)

Plasma Cleaning Unit (optional)*

UHV DN40CF port and power supply

Extra blank flange

UHV DN40CF

Inlet Gas Valve

UHV DN40CF

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

* An RF noise shielded PC is recommended for the use in connection with a PPD System.